标准编号：ISO 22493:2014
中文名称：微光束分析 扫描电子显微镜术 词汇表
英文名称：Microbeam analysis — Scanning electron microscopy — Vocabulary
发布日期：2014-04
标准范围
This International Standard defines terms used in the practice of scanning electron microscopy (SEM).It covers both general and specific concepts, classified according to their hierarchy in a systematic order,with those terms that have already been defined in ISO 23833 also included, where appropriate.This International Standard is applicable to all standardization documents relevant to the practice ofSEM. In addition, some clauses of this International Standard are applicable to documents relevant torelated fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.
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