标准编号：ISO 19685:2017
中文名称：真空技术 真空表 皮拉尼量表不确定度的规范、校准和测量
英文名称：Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
发布日期：2017-09
标准范围
This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges.
This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa.
This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards.
In addition, this document defines procedures to characterize Pirani gauges for response time and
hysteresis.
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