标准编号：ISO 5618-2:2024
中文名称：精细陶瓷（先进陶瓷、高技术陶瓷） GaN晶体表面缺陷的试验方法 第2部分：蚀刻坑密度的测定方法
英文名称：Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for GaN crystal surface defects — Part 2: Method for determining etch pit density
发布日期：2024-04
标准范围
This document describes a method for determining the etch pit density, which is used to detect dislocations and processing-introduced defects that occur on single-crystal GaN substrates or single-crystal GaN films.
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