标准编号：ISO/PAS 19451-1:2016
中文名称：ISO 26262-2011-2012半导体应用 第1部分：概念的应用
英文名称：Application of ISO 26262:2011-2012 to semiconductors — Part 1: Application of concepts
发布日期：2016-07
标准范围
This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
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