ISO 13083:2015 表面化学分析 扫描探针显微镜 电扫描探针显微镜（ESPMs）如2D掺杂成像和其他用途的扫描扩展电阻显微镜（SSRM）和扫描电容显微镜（SCM）空间分辨率的定义和校准标准

标准编号：ISO 13083:2015

中文名称：表面化学分析 扫描探针显微镜 电扫描探针显微镜（ESPMs）如2D掺杂成像和其他用途的扫描扩展电阻显微镜（SSRM）和扫描电容显微镜（SCM）空间分辨率的定义和校准标准

英文名称：Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-d

发布日期：2015-08

标准范围

This International Standard describes a method for measuring the spatial (lateral) resolution ofscanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs),which are widely used in imaging the distribution of carriers and other electrical properties insemiconductor devices. The method involves the use of a sharp-edged artefact.

标准预览图