标准编号：ISO 22489:2016
中文名称：微光束分析 电子探针微量分析 使用X射线波长色散光谱法对大试样进行定量点分析
英文名称：Microbeam analysis — Electron probe microanalysis — Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy
发布日期：2016-10
标准范围
This International Standard specifies requirements for the quantification of elements in a micrometre-sizedvolume of a specimen identified through analysis of the X-rays generated by an electron beam using awavelength-dispersive spectrometer (WDS) fitted either to an electron probe microanalyser or to a scanningelectron microscope (SEM).It describes:— the principle of the quantitative analysis;— the general coverage of this technique in terms of elements, mass fractions and reference specimens;— the general requirements for the instrument;— the fundamental procedures involved, such as specimen preparation, selection of experimental conditions,the measurements, the analysis of these and the report.This International Standard is intended for the quantitative analysis of a flat and homogeneous bulk specimenusing a normal incidence beam. It does not specify detailed requirements for either the instruments or the datareduction software. Operators should obtain information such as installation conditions, detailed procedures foroperation and specification of the instrument from the makers of any products used.
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