标准编号：ISO 29301:2010
中文名称：微束分析 分析透射电子显微镜 使用具有周期性结构的标准材料的图像放大校准法
英文名称：Microbeam analysis — Analytical transmission electron microscopy — Methods for calibrating image magnification by using reference materials having periodic structures
发布日期：2010-06
标准范围
This International Standard specifies a calibration procedure applicable to images recorded over a widemagnification range in a transmission electron microscope (TEM). The reference materials used for calibrationpossess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor oran analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This InternationalStandard is applicable to the magnification of the TEM image recorded on a photographic film, or an imagingplate, or detected by an image sensor built into a digital camera. This International Standard also refers to thecalibration of a scale bar. This International Standard does not apply to the dedicated critical dimensionmeasurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
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