ISO 21859:2019 精细陶瓷（高级陶瓷、高级工业陶瓷） 半导体制造设备中陶瓷元件等离子体电阻的试验方法

标准编号：ISO 21859:2019

中文名称：精细陶瓷（高级陶瓷、高级工业陶瓷） 半导体制造设备中陶瓷元件等离子体电阻的试验方法

英文名称：Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

发布日期：2019-06

标准范围

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

标准预览图