标准编号：ISO 25178-607:2019
中文名称：产品几何量技术规范（GPS） 表面结构：区域 第607部分：非接触的标称特性（共焦显微镜）工具
英文名称：Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
发布日期：2019-03
标准范围
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
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