标准编号：ISO 19606:2017
中文名称：精细陶瓷（高技术陶瓷、高级技术陶瓷） 精密陶瓷表面粗糙度的测试方法（电影原子力显微镜）
英文名称：Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
发布日期：2017-02
标准范围
This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.
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