标准编号：ISO/TS 25138:2019
中文名称：表面化学分析 辉光放电发射光谱法分析金属氧化物膜
英文名称：Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry
发布日期：2019-08
标准范围
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
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